Concepedia

Publication | Open Access

Ion-implantation induced anomalous surface amorphization in silicon

DOIFull Paper Access

37

Citations

14

References

1994

Year

T. Lohner, E. Kótai, N.Q. Khánh, Zsolt Tóth, M. Fried, K. Vedam, N. V. Nguyen, L.J. Hanekamp, A. van Silfhout
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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