T. Lohner

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Publications

Citations

1.8K

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Active since

1976

Affiliations

Institute for Technical Physics and Materials Science(Current)

Hungarian Academy of Sciences

University of Twente

Institute for Particle and Nuclear Physics

Fraunhofer Institute for Integrated Circuits

T. Lohner is an author at Institute for Technical Physics and Materials Science specializing in materials science, materials engineering, and natural sciences.

Publications per year

1976–2020

Publications

Determination of complex dielectric functions of ion implanted and implanted-annealed amorphous silicon by spectroscopic ellipsometry

M. Fried, T. Lohner, W.A.M. Aarnink et al. · Journal of Applied Physics · 1992 · 105 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy

P. Petrík, László Péter Biró, M. Fried et al. · Thin Solid Films · 1998 · 101 citations

Natural Sciences, Materials Science, Physics +17

Porous silicon formation by stain etching

É. Vázsonyi, E. Szilágyi, P. Petrík et al. · Thin Solid Films · 2001 · 97 citations

Engineering, Materials Engineering, Materials Science +14

Nondestructive determination of damage depth profiles in ion-implanted semiconductors by spectroscopic ellipsometry using different optical models

M. Fried, T. Lohner, W.A.M. Aarnink et al. · Journal of Applied Physics · 1992 · 86 citations

Engineering, Materials Engineering, Materials Science +17

Nondestructive determination of damage depth profiles in ion-implanted semiconductors by multiple-angle-of-incidence single-wavelength ellipsometry using different optical models

M. Fried, T. Lohner, E. Jároli et al. · Journal of Applied Physics · 1992 · 64 citations

Engineering, Materials Engineering, Materials Science +17

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