Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films - Concepedia

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Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films

133

Citations

79

References

2006

Year

C. Lavoie, Christophe Detavernier, C. Cabral, F. M. d’Heurle, A.J. Kellock, Jean Jordan‐Sweet, J. M. E. Harper

Microelectronic Engineering

Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringNickel Monosilicide FilmsApplied PhysicsAdditive ElementsThin FilmsChemical DepositionChemical Vapor DepositionMorphological StabilityThin Film Processing

References

	Year	Citations

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