Concepedia

Shun-ichiro Ohmi

SO

35

Publications

1.1K

Citations

18

H-Index

1994

Active since

Affiliations

Tokyo Institute of Technology(Current)

Hodges University

Semiconductor Manufacturing International (Italy)

Musashi University

Shun-ichiro Ohmi is an author at Tokyo Institute of Technology specializing in engineering, microelectronics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringMicroelectronicsMaterial ScienceSurface ScienceThin FilmsNanoelectronicsMaterials EngineeringElectronic Devices

Publications per year

1994–2021

35

Publications

35

NiSi salicide technology for scaled CMOS

Hiroshi Iwai, T. Ohguro, Shun-ichiro Ohmi · Microelectronic Engineering · 2002 · 306 citations

Electrical Engineering, Nisi Salicide Technology, Engineering +4

Silicon integrated circuit technology from past to future

Hiroshi Iwai, Shun-ichiro Ohmi · Microelectronics Reliability · 2002 · 118 citations

Electrical Engineering, Engineering, Device Integration +8

Advanced gate dielectric materials for sub-100 nm CMOS

Hiroshi Iwai, Shun-ichiro Ohmi, S. Akama et al. · 2003 · 95 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Composition, chemical structure, and electronic band structure of rare earth oxide/Si(1 0 0) interfacial transition layer

Takanori Hattori, T. Yoshida, Tomohiro Shiraishi et al. · Microelectronic Engineering · 2004 · 87 citations

Materials Science, Ii-vi Semiconductor, Rare Earth Mineral +9

Space-Charge-Limited Currents in La<sub>2</sub>O<sub>3</sub> Thin Films Deposited by E-Beam Evaporation after Low Temperature Dry-Nitrogen Annealing

Yongshik Kim, Shun-ichiro Ohmi, Kazuo Tsutsui et al. · Japanese Journal of Applied Physics · 2005 · 46 citations

Engineering, E-beam Evaporation, Thin Film Process Technology +18

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