1
Publications
95
Citations
1
H-Index
2003
Active since
Affiliations
Tokyo Institute of Technology(Current)
S. Akama is an author at Tokyo Institute of Technology specializing in applied physics, engineering, and thin films.
Top concepts
Thin FilmsEngineeringApplied PhysicsNanoelectronicsMaterial ScienceMicroelectronicsMaterials EngineeringElectrical Engineering
Publications per year
2003–2003
1
1
Advanced gate dielectric materials for sub-100 nm CMOS
Hiroshi Iwai, Shun-ichiro Ohmi, S. Akama et al. · 2003 · 95 citations
Materials Science, Materials Engineering, Electrical Engineering +14
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