Microelectronic Engineering · 2004 · 87 citations · 9 references
Natural SciencesMaterials SciencePhysicsElectronic MaterialsInorganic ChemistryMaterials ChemistryInorganic MaterialsOxide SemiconductorsSemiconductor InterfacesSemiconductor SurfacesSemiconductor Thin FilmsSilicon MaterialsElectronic Band GapElectronic Band TheoryInterfacial Oxide LayersOxide Electronic StructureRare-earth CompoundsRare-earth OxidesThin Oxide FilmsThin Oxide Layers
9