Journal of Micromechanics and Microengineering · 2003 · 22 citations · 8 references
EngineeringMechanical EngineeringSystems EngineeringComputational MechanicsMicroelectromechanical SystemsStructural DynamicsDevice SimulationElectrostatic ActuationMems DesignMems ModelingMems SimulationActuation ForceComponent Mode SynthesisConstraint EquationsElectrostatic Actuation ModelingElectrostatic Microelectromechanical SystemsGeneralized CoordinatesProper Orthogonal DecompositionVibration Modeling
10.1088/0960-1317/13/5/316
8
Dynamic analysis of structural systems using component modes
Walter C. Hurty · AIAA Journal · 1965 · 1.2K citations