Concepedia

Electrostatic Microelectromechanical Systems

Electrostatic Microelectromechanical Systems is a class of microscale electromechanical devices in which the primary actuation mechanism is based on electrostatic forces generated by applied electric fields, distinguished from other microactuation methods by the absence of magnetic or piezoelectric driving components.

523

Publications

21.9K

Citations

1.4K

Authors

443

Institutions

Publications per year

2017–2026

74

Variants

Electrostatic Mems

Parents

Publications

523

Electrostatic spinning of acrylic microfibers

Peter K Baumgarten · Journal of Colloid and Interface Science · 1971 · 799 citations

, , +12

M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

P.M. Osterberg, S.D. Senturia · Journal of Microelectromechanical Systems · 1997 · 764 citations

, , +17

Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field

Felix Beyeler, Adrian Neild, Stefano Oberti et al. · Journal of Microelectromechanical Systems · 2007 · 365 citations

, , +17

An Untethered, Electrostatic, Globally Controllable MEMS Micro-Robot

Bruce R. Donald, Christopher G. Levey, Craig D. McGray et al. · Journal of Microelectromechanical Systems · 2006 · 338 citations

, , +15

Review of modeling electrostatically actuated microelectromechanical systems

R.C. Batra, Maurizio Porfiri, Davide Spinello · Smart Materials and Structures · 2007 · 287 citations

, , +17

1–5 of 523

Authors

1.4K

  1. GR
    Ghader Rezazadeh

    Urmia University, Iran

    13 publications · 380 citations

    11

    h-index

  2. NR
    N. R. Aluru

    University of Illinois Urbana-Champaign, United States

    10 publications · 605 citations

    10

    h-index

  3. MI
    Mohammad I. Younis

    King Abdullah University of Science and Technology, Saudi Arabia

    10 publications · 608 citations

    10

    h-index

  4. SS
    S.D. Senturia

    Massachusetts Institute of Technology, United States

    7 publications · 1.4K citations

    7

    h-index

  5. HM
    Hassen M. Ouakad

    Sultan Qaboos University, Oman

    7 publications · 273 citations

    7

    h-index

1–5 of 1.4K

Institutions

443

  1. Centre National de la Recherche Scientifique

    Paris, France

    15 h-index

    53 publications

    2.2K citations

  2. Massachusetts Institute of Technology

    Cambridge, United States

    15 h-index

    43 publications

    4.2K citations

  3. University of Michigan

    Ann Arbor, United States

    14 h-index

    46 publications

    1.3K citations

  4. The University of Tokyo

    Tokyo, Japan

    12 h-index

    40 publications

    1K citations

  5. Urmia University

    Urmia, Iran

    12 h-index

    42 publications

    1.3K citations

  6. Binghamton University

    Binghamton, United States

    10 h-index

    32 publications

    1.8K citations

  7. University of Illinois Urbana-Champaign

    Urbana, United States

    10 h-index

    22 publications

    1.4K citations

  8. Sharif University of Technology

    Tehran, Iran

    9 h-index

    21 publications

    358 citations

1–8 of 443

Venues

  1. Journal of Microelectromechanical Systems

    81 publications · 5.7K citations

    37

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 49 publications · 2.1K citations

    26

    h-index

  3. Sensors and Actuators A Physical

    29 publications · 1.4K citations

    20

    h-index

  4. Microsystem Technologies

    16 publications · 503 citations

    12

    h-index

  5. Applied Physics Letters

    12 publications · 340 citations

    11

    h-index

1–5