Smart Materials and Structures · 2007 · 287 citations · 108 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsElectromagnetismMicroelectromechanical SystemsElectromechanical SystemsElectrostatic ActuationElectrostatic ActuatorsMems ActuatorsMems ModelingMems SimulationElectromechanical ModelingElectrostatic Actuation ModelingElectrostatic Force ModelingElectrostatic Mems ActuatorsElectrostatic Microelectromechanical SystemsMicroelectromechanical ActuatorsModeling Of Electrostatic ActuatorsReduced-order Multiphysics Models
A wide range of MEMSs are actuated by electrostatic forces, requiring multiphysics modeling to capture the coupling among solid, fluid, thermomechanical, and electromagnetic fields. This work provides an overview of models for electrostatically actuated MEMSs. The review outlines three‑dimensional nonlinear electromechanical fluid–structure interaction formulations, reduced‑order models with their assumptions, and classifies theoretical, numerical, and experimental studies by mechanical model.
A wide range of microelectromechanical systems (MEMSs) and devices are actuated using electrostatic forces. Multiphysics modeling is required, since coupling among different fields such as solid and fluid mechanics, thermomechanics and electromagnetism is involved. This work presents an overview of models for electrostatically actuated MEMSs. Three-dimensional nonlinear formulations for the coupled electromechanical fluid–structure interaction problem are outlined. Simplified reduced-order models are illustrated along with assumptions that define their range of applicability. Theoretical, numerical and experimental works are classified according to the mechanical model used in the analysis.
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New developments in the Casimir effect
Physics Reports · 2001 · 1.5K citations · Full text
H.C. Nathanson, W.E. Newell, R.A. Wickstrom et al. · IEEE Transactions on Electron Devices · 1967 · 1.1K citations