CIRP Annals · 2006 · 137 citations · 188 references
EngineeringMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsMetrologyMicrofabricationAtomic Force MicroscopyDimensional MetrologyForm MetrologyNanomechanicsScanning Probe MicroscopySurface MetrologyAtomic Force Microscopy AnalysisAtomic Force Microscopy MetrologyAtomic Force Microscopy Surface AnalysisSurface Topography MappingThree-dimensional Metrology
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