Hans‐Ulrich Danzebrink

Metrological large range scanning probe microscope

Gaoliang Dai, Frank Pohlenz, Hans‐Ulrich Danzebrink et al. · Review of Scientific Instruments · 2004 · 149 citations

Engineering, Abbe Offset, Microscopy +21

Critical review of the current status of thickness measurements for ultrathin SiO ₂ on Si Part V: Results of a CCQM pilot study

M. P. Seah, Steven J. Spencer, Farid Bensebaa et al. · Surface and Interface Analysis · 2004 · 139 citations

Advances in Scanning Force Microscopy for Dimensional Metrology

Hans‐Ulrich Danzebrink, Ludger Koenders, Günter Wilkening et al. · CIRP Annals · 2006 · 137 citations

Engineering, Microscopy Method, Microscopy +4

Accurate and traceable calibration of two-dimensional gratings

Gaoliang Dai, Frank Pohlenz, Thorsten Dziomba et al. · Measurement Science and Technology · 2007 · 110 citations

Engineering, Microscopy, Measurement +16

Accurate and traceable calibration of one-dimensional gratings

Gaoliang Dai, Ludger Koenders, Frank Pohlenz et al. · Measurement Science and Technology · 2005 · 110 citations

Engineering, Microscopy, Measurement +16