Concepedia

Three-dimensional Metrology

Three-Dimensional Metrology is a metrological discipline that characterizes the spatial dimensions and surface topography of microfabricated structures with nanoscale precision by measuring in all three orthogonal axes, distinguishing it from two-dimensional techniques limited to lateral feature analysis.

413

Publications

17.8K

Citations

1.4K

Authors

459

Institutions

Publications per year

2017–2026

86

Variants

3D Metrology

Parents

Publications

413

Computed tomography for dimensional metrology

Jean‐Pierre Kruth, Markus Bartscher, Simone Carmignato et al. · CIRP Annals · 2011 · 672 citations

, , +11

Parallel quasi-phase-shifting digital holography

Yasuhiro Awatsuji, Masaki Sasada, Toshihiro Kubota · Applied Physics Letters · 2004 · 421 citations

, , +14

Probing Systems in Dimensional Metrology

Albert Weckenmann, Tyler Estler, G.N. Peggs et al. · CIRP Annals · 2004 · 331 citations

, , +11

Optical Methods for Dimensional Metrology in Production Engineering

H. Schwenke, Ulrich Neuschaefer-Rube, Tilo Pfeifer et al. · CIRP Annals · 2002 · 299 citations

, , +16

Micro Fourier Transform Profilometry (μFTP): 3D shape measurement at 10,000 frames per second

Chao Zuo, Tianyang Tao, Shijie Feng et al. · Optics and Lasers in Engineering · 2017 · 268 citations · Full text

, , +13

1–5 of 413

Authors

1.4K

  1. RL
    Richard Leach

    University of Nottingham, United Kingdom

    8 publications · 279 citations

    8

    h-index

  2. XJ
    Xiangqian Jiang

    University of Huddersfield, United Kingdom

    6 publications · 647 citations

    6

    h-index

  3. LB
    Liam Blunt

    University of Huddersfield, United Kingdom

    6 publications · 381 citations

    6

    h-index

  4. AW
    Albert Weckenmann

    Friedrich-Alexander-Universität Erlangen-Nürnberg, Germany

    6 publications · 1.5K citations

    6

    h-index

  5. AV
    András Vládar

    National Institute of Standards and Technology, United States

    6 publications · 134 citations

    6

    h-index

1–5 of 1.4K

Institutions

459

  1. National Institute of Standards and Technology

    Gaithersburg, United States

    15 h-index

    71 publications

    2.5K citations

  2. Physikalisch-Technische Bundesanstalt

    Braunschweig, Germany

    14 h-index

    62 publications

    4.6K citations

  3. National Physical Laboratory

    London, United Kingdom

    13 h-index

    30 publications

    1.2K citations

  4. Friedrich-Alexander-Universität Erlangen-Nürnberg

    Erlangen, Germany

    10 h-index

    26 publications

    2.5K citations

  5. Technical University of Denmark

    Kongens Lyngby, Denmark

    10 h-index

    20 publications

    1.4K citations

  6. University of Huddersfield

    Huddersfield, United Kingdom

    9 h-index

    20 publications

    1.7K citations

  7. KU Leuven

    Leuven, Belgium

    6 h-index

    16 publications

    1.8K citations

  8. Technische Universität Ilmenau

    Ilmenau, Germany

    6 h-index

    26 publications

    1.4K citations

1–8 of 459

Venues

  1. Measurement Science and Technology

    41 publications · 1.7K citations

    22

    h-index

  2. Optics and Lasers in Engineering

    17 publications · 1.2K citations

    16

    h-index

  3. 14

    h-index

  4. Precision Engineering

    17 publications · 721 citations

    13

    h-index

  5. Applied Optics

    12 publications · 644 citations

    12

    h-index

1–5