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Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections

Materials ScienceElectrical EngineeringChemical EngineeringCopper InterconnectionsElectroless DepositionEngineeringCorrosionSurface ElectrochemistryElectrode-electrolyte InterfaceSurface ScienceAlkali-metal-free BathChemical DepositionElectrochemical InterfaceElectrochemistry