Concepedia

Hyongmoo Rhee

HR

3

Publications

70

Citations

3

H-Index

2008

Active since

Affiliations

Ajou University(Current)

Hyongmoo Rhee is an author at Ajou University specializing in engineering, surface science, and materials science.

Top concepts

EngineeringSurface ScienceMaterial ScienceApplied PhysicsMicroelectronicsMicrofabricationElectrical EngineeringCorrosionElectrochemistryChemical Engineering

Publications per year

2008–2009

3

Publications

3

Comparison of deep silicon etching using SF6/C4F8 and SF6/C4F6 plasmas in the Bosch process

Hyongmoo Rhee, Hyeokkyu Kwon, Chang‐Koo Kim et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 38 citations

Materials Science, Electrical Engineering, Engineering +13

Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections

S.M.S.I. Dulal, Tae Ho Kim, Hyongmoo Rhee et al. · Journal of Alloys and Compounds · 2008 · 19 citations

Materials Science, Electrical Engineering, Chemical Engineering +11

Dependence of etch rates of silicon substrates on the use of C4F8 and C4F6 plasmas in the deposition step of the Bosch process

Hyongmoo Rhee, Hae Min Lee, Yun Mi Namkoung et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 13 citations

Materials Science, Materials Engineering, Engineering +13

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