Hyongmoo Rhee - Concepedia

Author

Hyongmoo Rhee

Also Known As

Hyongmoo Rhee

Publications

Citations

H-Index

Concepts

All Affiliations

Hyongmoo Rhee is an author at Ajou University specializing in engineering, surface science, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	70
2	Applied Physics	2	2	51
3	Electrical Engineering	2	2	57
4	Chemical Engineering	1	1	19
5	Materials Engineering	1	1	13

Hyongmoo Rhee

Publications

Citations

H-Index

Page 1

	Year	Citations
Comparison of deep silicon etching using SF6/C4F8 and SF6/C4F6 plasmas in the Bosch process Hyongmoo Rhee, Hyeokkyu Kwon, Chang‐Koo Kim, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceElectrical EngineeringEngineeringMicrofabricationSurface Science	2008	38
Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections S.M.S.I. Dulal, Tae Ho Kim, Hyongmoo Rhee, Journal of Alloys and Compounds Materials ScienceElectrical EngineeringChemical EngineeringCopper InterconnectionsElectroless Deposition	2008	19
Dependence of etch rates of silicon substrates on the use of C4F8 and C4F6 plasmas in the deposition step of the Bosch process Hyongmoo Rhee, Hae Min Lee, Yun Mi Namkoung, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceMaterials EngineeringEngineeringMicrofabricationPlasma Application	2009	13

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