Microelectronics Reliability · 2013 · 37 citations · 18 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsSemiconductor Device MaterialsSemiconductor SurfacesSemiconductor Thin FilmsSurface PassivationThin-film MaterialsThin-film TransistorsAmorphous Semiconductor FilmsAmorphous Thin FilmsGate Oxide Thickness EffectsPassivationPassivation Layer StabilityPassivation LayersThin-film Semiconductors
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