Circuit World · 2004 · 34 citations · 13 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsManufacturing ProcessesMicrofabricationChip PackagingIntegrated Circuit DesignIntegrated Circuit FabricationCopper DepositionElectroplated MaterialsPlatingPrinted Circuit BoardsVia Formation
Printed circut boards (PCBs) have diminished in size and, simultaneously, their circuit densities have increased. Conventional multi‐layered PCBs have a limitation to higher packaging densities. This paper introduces a new copper electroplating formula that is able to fill vias and through holes simultaneously and is used in a DC plating method, in which the copper thickness deposited on the board surface is relatively very thin after the electroplating is completed.
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Superconformal Electrodeposition of Copper
Thomas P. Moffat, Daniel Wheeler, William Huber et al. · Electrochemical and Solid-State Letters · 2001 · 325 citations