IEEE Electron Device Letters · 1985 · 40 citations · 5 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthHigh-frequency Semiconductor DevicesIii-v SemiconductorsSemiconductor Device MaterialsSemiconductor PhysicsSemiconductor Thin FilmsEpitaxial Film GrowthEpitaxial MaterialsEpitaxial Thin FilmsEpitaxial Thin-film GrowthGaas Microwave Integrated CircuitsMolecular Beam EpitaxySilicon
High-quality epitaxial films of 2.3-µm-thick GaAs were grown on 3-in-diam
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