Reactive sputtering of TiOxNy coatings by the reactive gas pulsing process. Part I: Pattern and period of pulses - Concepedia

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Reactive sputtering of TiOxNy coatings by the reactive gas pulsing process. Part I: Pattern and period of pulses

48

Citations

42

References

2007

Year

Nicolas Martin, Jan Lintymer, Joseph Gavoille, J.M. Chappé, F. Sthal, J. Takadoum, F. Vaz, L. Rebouta

Surface and Coatings Technology

Materials ScienceThermal Spray CoatingChemical EngineeringEngineeringSurface ScienceReactive SputteringTioxny CoatingsProtective Coating

References

	Year	Citations

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