Concepedia

Influence of the nitrogen partial pressure on the properties of d.c.-sputtered titanium and titanium nitride films

Guy Lempérière, J.M. Poitevin

Thin Solid Films · 1984 · 128 citations · 24 references

DOI

Concepts

References

24

Adsorption of Gases in Multimolecular Layers

Stephen Brunauer, P. H. Emmett, Edward Teller · Journal of the American Chemical Society · 1938 · 27.6K citations

, , +16

Ion Energies at the Cathode of a Glow Discharge

William D. Davis, T. A. Vanderslice · Physical Review · 1963 · 378 citations

, , +10

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

Harold F. Winters, Peter Sigmund · Journal of Applied Physics · 1974 · 318 citations

, , +17

Sputtering Yields at Very Low Bombarding Ion Energies

R. V. Stuart, G. K. Wehner · Journal of Applied Physics · 1962 · 306 citations

, , +12

Applications of TiN thin films in silicon device technology

M. Wittmer, H. Melchior · Thin Solid Films · 1982 · 156 citations

, , +14