Reactive sputtering of metals in oxidizing atmospheres

Oxidation of metals and alloys

Herbert H. Uhlig · Journal of Chemical Education · 1954 · 732 citations

Engineering, Oxidation Resistance, Media Standards +18

PLASMA DIAGNOSTICS OF AN rf-SPUTTERING GLOW DISCHARGE

J. W. Coburn, E. Kay · Applied Physics Letters · 1971 · 154 citations

Electrical Engineering, Engineering, Physics +15

The mechanism of reactive sputtering

E. Hollands, David Campbell · Journal of Materials Science · 1968 · 94 citations

Materials Engineering, Engineering, Physics +7

Effect of Oxygen on the rf-Sputtering Rate of SiO2

Reese E. Jones, Harold F. Winters, L. I. Maissel · Journal of Vacuum Science and Technology · 1968 · 58 citations

Materials Engineering, Argon-sputtering Gas, Engineering +8

A spectroscopic investigation of the reactive sputtering of aluminium

András Stirling, W. D. Westwood · Thin Solid Films · 1971 · 50 citations

Materials Science, Materials Engineering, Aluminium Nitride +7