Reactive sputtering of metals in oxidizing atmospheres

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	Year	Citations
Oxidation of metals and alloys Herbert H. Uhlig Journal of Chemical Education EngineeringOxidation ResistanceMedia StandardsAltmetric Attention ScoreBibliometrics	1954	732
PLASMA DIAGNOSTICS OF AN rf-SPUTTERING GLOW DISCHARGE J. W. Coburn, E. Kay Applied Physics Letters Electrical EngineeringEngineeringPhysicsGlow DischargeMass Spectrometry	1971	154
The mechanism of reactive sputtering E. Hollands, David Campbell Journal of Materials Science Materials EngineeringEngineeringPhysicsTarget FabricationApplied Physics	1968	94
Effect of Oxygen on the rf-Sputtering Rate of SiO2 Reese E. Jones, Harold F. Winters, L. I. Maissel Journal of Vacuum Science and Technology Materials EngineeringArgon-sputtering GasEngineeringPhysicsOxide Electronics	1968	58
A spectroscopic investigation of the reactive sputtering of aluminium András Stirling, W. D. Westwood Thin Solid Films Materials ScienceMaterials EngineeringAluminium NitrideEngineeringSurface Science	1971	50
Charge Phenomena in dc Reactively Sputtered SiO2 Films S. Y. Wu, N. P. Formigoni Journal of Applied Physics Materials ScienceSemiconductorsElectrical EngineeringEngineeringOxide Electronics	1968	13

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