A spectroscopic investigation of the reactive sputtering of aluminium

Physics of Thin Films

G. Hass, D. Gerstenberg · Journal of The Electrochemical Society · 1964 · 1.8K citations

Materials Science, Thin Film Physics, Engineering +8

The mechanism of reactive sputtering

E. Hollands, David Campbell · Journal of Materials Science · 1968 · 94 citations

Materials Engineering, Engineering, Physics +7

Getter Sputtering for the Preparation of Thin Films of Superconducting Elements and Compounds

H. C. Theuerer, J. J. Hauser · Journal of Applied Physics · 1964 · 79 citations

Superconducting Material, Engineering, Thin Film Process Technology +16

Investigation of the Sputtering of Aluminum Using Atomic-Absorption Spectroscopy

András Stirling, W. D. Westwood · Journal of Applied Physics · 1970 · 51 citations

Aluminium Nitride, Engineering, Atomic Emission Spectroscopy +20

Special Cases of Predissociation

B.‐G. Rosén · Physical Review · 1945 · 31 citations

Engineering, Chemistry, Electronic Structure +16