Statistics
Publications
88
Citations
5.9K
H-Index
41
Active since
1961
Affiliations
E. Kay is an author at IBM (United States) specializing in natural sciences, materials science, and physics.
Publications per year
1961–1997
88
88
Plasma potentials of 13.56-MHz rf argon glow discharges in a planar system
Klaus Köhler, J. W. Coburn, D. E. Horne et al. · Journal of Applied Physics · 1985 · 399 citations
Gas Incorporation into Sputtered Films
Harold F. Winters, E. Kay · Journal of Applied Physics · 1967 · 233 citations
Natural Sciences, Materials Engineering, Materials Science +16
1–5 of 88