Concepedia

Epitaxy solutions for Ge MOS technology

Frederik Leys, Renaud Bonzom, Roger Loo, Olivier Richard, Brice De Jaeger, Jan Van Steenbergen, Kristof Dessein, Thierry Conard, Jens Rip, H. Bender,

Thin Solid Films · 2005 · 24 citations · 8 references

DOI

Concepts

References

8

Surfactants in epitaxial growth

M. Copel, M. C. Reuter, Efthimios Kaxiras et al. · Physical Review Letters · 1989 · 1.1K citations

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Oil Lenses on Water and the Nature of Monomolecular Expanded Films

Irving Langmuir · The Journal of Chemical Physics · 1933 · 381 citations

, , +8

A Stagnant Layer Model for the Epitaxial Growth of Silicon from Silane in a Horizontal Reactor

F. C. Eversteyn, P. J. Severin, C. H. J. v. d. Brekel et al. · Journal of The Electrochemical Society · 1970 · 273 citations

, , +10

Stress-induced layer-by-layer growth of Ge on Si(100)

J. Tersoff · Physical review. B, Condensed matter · 1991 · 161 citations

, , +17

The Kinetics of Silicon Deposition on Silicon by Pyrolysis of Silane

R. F. C. Farrow · Journal of The Electrochemical Society · 1974 · 161 citations · Full text

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