Microhand for biological applications

Abstract

A microhand, approximately 1mm in fist diameter, has been developed with microelectromechanical systems technology to mimic the human hand in microscale. The hand has multiple microfingers, composed of silicon phalanges and polymer-balloon joints. By pneumatically inflating and deflating the balloon joints, the microfingers perform the motions of flexion and extension. This device possesses attractive characteristics: (i) gentle but strong holding, (ii) out-of-plane enclosure, (iii) active grasping, (iv) being inert to surroundings, and (v) reliable monolithic construction. It operates in both air and aqueous environments, as well as demonstrates grasping, stretching, and detaching of soft objects in submillimeter scale for biological applications.