D. Ciarlo

Formation of silicon tips with <1 nm radius

R. B. Marcus, T. S. Ravi, T. J. Gmitter et al. · Applied Physics Letters · 1990 · 260 citations

Engineering, Silicon Tips, Integrated Circuits +16

Electron Density Measurements of High Density Plasmas Using Soft X-Ray Laser Interferometry

L. B. Da Silva, Troy W. Barbee, R. Cauble et al. · Physical Review Letters · 1995 · 184 citations

X-ray Spectroscopy, Engineering, Electron Density Measurements +17

A practical microgripper by fine alignment, eutectic bonding and SMA actuation

Abraham P. Lee, D. Ciarlo, Peter A Krulevitch et al. · Sensors and Actuators A Physical · 1996 · 114 citations

Fine Alignment, Engineering, Dc Microgrids +7

Modeling and fabricating micro-cavity integrated vacuum tubes

W.J. Orvis, C. McConaghy, D. Ciarlo et al. · IEEE Transactions on Electron Devices · 1989 · 66 citations

Engineering, Mechanical Engineering, Integrated Circuits +16

A latching accelerometer fabricated by the anisotropic etching of (110) oriented silicon wafers

D. Ciarlo · Journal of Micromechanics and Microengineering · 1992 · 63 citations

Engineering, Accelerometer, Latching Accelerometer +16