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Electrical properties of high-κ gate dielectrics: Challenges, current issues, and possible solutions

Semiconductor TechnologyElectrical EngineeringSemiconductor DeviceEngineeringHigh Voltage EngineeringBias Temperature InstabilityApplied PhysicsTime-dependent Dielectric BreakdownHigh-κ Gate DielectricsPossible SolutionsMicroelectronicsElectrical PropertiesElectrical Insulation