Selective etching of silicon in aqueous ammonia solution

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

Study of electrochemical etch-stop for high-precision thickness control of silicon membranes

B. Kloeck, Scott D. Collins, N. F. de Rooij et al. · IEEE Transactions on Electron Devices · 1989 · 209 citations

Engineering, Materials Engineering, Materials Science +17

Bias‐Dependent Etching of Silicon in Aqueous  KOH

O. J. Glembocki, Robert E. Stahlbush, Micha Tomkiewicz · Journal of The Electrochemical Society · 1985 · 138 citations

Natural Sciences, Chemistry, Materials Science +17

Ellipsometric Study of Orientation‐Dependent Etching of Silicon in Aqueous  KOH

E. D. Palik, V. M. Bermudez, O. J. Glembocki · Journal of The Electrochemical Society · 1985 · 129 citations

Engineering, Materials Engineering, Materials Science +17

NH4Oh-based etchants for silicon micromachining

Uwe Schnakenberg, W. Benecke, D. Löchel · Sensors and Actuators A Physical · 1990 · 116 citations

Engineering, Materials Engineering, Materials Science +14