Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications

Proceedings of 1995 IEEE International Conference on Robotics and Automation

1995 · 2.8K citations

Engineering, Mechanical Engineering, Robotics Engineering +12

Microfluidics-a review

Peter Gravesen, J. Branebjerg, O S Jensen · Journal of Micromechanics and Microengineering · 1993 · 1K citations

Engineering, Bioengineering, Fluid Dynamics +16

Microflow devices and systems

S. Shoji, Masayoshi Esashi · Journal of Micromechanics and Microengineering · 1994 · 496 citations

Engineering, Chemical Engineering, Mechanical Engineering +17

Millipede-a MEMS-based scanning-probe data-storage system

Evangelos Eleftheriou, Theodore Antonakopoulos, G. Binnig et al. · IEEE Transactions on Magnetics · 2003 · 229 citations

Engineering, Electrical Engineering, Mechanical Engineering +8

A self-retracting fully compliant bistable micromechanism

N. Masters, Larry L. Howell · Journal of Microelectromechanical Systems · 2003 · 142 citations

Engineering, Mechanical Engineering, Actuators +16