Concepedia

Multi-axis Mems Actuation

Multi-Axis MEMS Actuation is a MEMS actuation mechanism that enables controlled mechanical motion along two or more orthogonal axes within a single micro-electro-mechanical system, distinguishing itself from single-axis actuation by providing enhanced spatial mobility and operational versatility in microscale applications.

13

Publications

504

Citations

42

Authors

22

Institutions

Publications per year

2017–2026

1

Parents

Publications

13

Multi-DOF inertial MEMS: From gaming to dead reckoning

Farrokh Ayazi · 2011 · 85 citations

, , +17

Electromagnetically Actuated Mirror Arrays for Use in 3-D Optical Switching Applications

Jonathan Bernstein, W.P. Taylor, John D. Brazzle et al. · Journal of Microelectromechanical Systems · 2004 · 85 citations

, , +14

Design and modeling of a six DOFs MEMS-based precision manipulator

Dannis Michel Brouwer, B.R. de Jong, Herman Soemers · Precision Engineering · 2009 · 66 citations · Full text

, , +12

Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications

Rajesh Luharuka, Peter J. Hesketh · Sensors and Actuators A Physical · 2006 · 53 citations

, , +15

Large range dual-axis micro-stage driven by electrostatic comb-drive actuators

Mohammad Olfatnia, Leqing Cui, Pankaj Chopra et al. · Journal of Micromechanics and Microengineering · 2013 · 42 citations

, , +17

1–5 of 13

Authors

42

  1. GC
    Gordon C. Brown

    University of Michigan, United States

    1 publications · 13 citations

    1

    h-index

  2. GA
    Gregory A. Kirkos

    Draper Laboratory, United States

    1 publications · 85 citations

    1

    h-index

  3. MA
    Michael A. Greminger

    University of Minnesota, United States

    1 publications · 13 citations

    1

    h-index

  4. BJ
    Bradley J. Nelson

    ETH Zurich, Switzerland

    1 publications · 13 citations

    1

    h-index

  5. TM
    Tom Montague

    MicroVision (United States), United States

    1 publications · 39 citations

    1

    h-index

1–5 of 42

Institutions

22

  1. University of Michigan

    Ann Arbor, United States

    2 h-index

    6 publications

    218 citations

  2. Georgia Institute of Technology

    Atlanta, United States

    2 h-index

    3 publications

    191 citations

  3. University of California, Berkeley

    Berkeley, United States

    1 h-index

    1 publications

    17 citations

  4. University of Minnesota

    Minneapolis, United States

    1 h-index

    1 publications

    13 citations

  5. Corning (United States)

    Corning, United States

    1 h-index

    2 publications

    170 citations

  6. Applied Technologies (United States)

    Longmont, United States

    1 h-index

    2 publications

    132 citations

  7. Philips (Netherlands)

    Amsterdam, The Netherlands

    1 h-index

    2 publications

    132 citations

  8. University of California, Irvine

    Irvine, United States

    1 h-index

    3 publications

    111 citations

1–8 of 22

Venues

  1. Journal of Microelectromechanical Systems

    2 publications · 99 citations

    2

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 1 publications · 42 citations

    1

    h-index

  3. 1

    h-index

  4. Precision Engineering

    1 publications · 66 citations

    1

    h-index

  5. Sensors and Actuators A Physical

    1 publications · 53 citations

    1

    h-index

1–5