Improving yield, accuracy and complexity in surface tension self-assembled MOEMS

Surface micromachining for microelectromechanical systems

J.M. Bustillo, Roger T. Howe, R.S. Muller · Proceedings of the IEEE · 1998 · 639 citations

Engineering, Materials Engineering, Materials Science +17

Controlled Folding of Micrometer-Size Structures

Elisabeth Smela, Olle Inganäs, Ingemar Lundström · Science · 1995 · 582 citations

Engineering, Materials Engineering, Materials Science +15

Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments

Carlos H. Mastrangelo, C.H. Hsu · Journal of Microelectromechanical Systems · 1993 · 331 citations

Engineering, Materials Engineering, Materials Science +17

Integrated movable micromechanical structures for sensors and actuators

L.-S. Fan, R.S. Muller · IEEE Transactions on Electron Devices · 1988 · 296 citations

Engineering, Materials Science, Mechanical Engineering +17

Microfabricated hinges

Kristofer S. J. Pister, Michael W. Judy, Steve R. Burgett et al. · Sensors and Actuators A Physical · 1992 · 279 citations