Applied Physics Letters · 2000 · 73 citations · 14 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistrySemiconductor MaterialsDopingFerromagnetic MaterialsFerromagnetismMagnetic CharacterizationSemiconductor PhysicsWide-bandgap SemiconductorsExtended X-ray Absorption Fine StructureFerromagnetic SemiconductorsGallium NitrideGallium Nitride (Gan) MaterialsGallium Nitride Crystal GrowthMolecular Beam EpitaxySubstrate Temperature EffectsX-ray Diffraction Analysis
We succeeded in growing highly Fe-doped GaN films by solid-source molecular beam epitaxy using an electron-cyclotron-resonance microwave nitrogen plasma. The substrate temperature was in the range of 380–520 °C. The samples were analyzed by x-ray diffraction and transmission electron microscopy, and showed hexagonal (wurtzite) or cubic (zincblende) structure or a mixture of both phases. The Fe concentration was on the order of 1019 cm−3 and extended x-ray absorption fine structure data show that the Fe is substituting the Ga in GaN. The magnetization measurements as a function of temperature reveal ferromagnetic properties below 100 K for the sample grown at the lowest temperature.
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