Thermal oxidation of chemical vapour deposited tungsten layers on silicon substrates for embedded non-volatile memory application

Rakesh Sohal, Christian Walczyk, P. Zaumseil, D. Wolansky, A. Fox, Bernd Tillack, Hans‐Joachim Müssig, Thomas Schroeder

Thin Solid Films · 2008 · 34 citations · 39 references

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