Concepedia

Publication | Closed Access

Thermal oxidation of chemical vapour deposited tungsten layers on silicon substrates for embedded non-volatile memory application

DOI

31

Citations

39

References

2008

Year

Rakesh Sohal, Christian Walczyk, P. Zaumseil, D. Wolansky, A. Fox, Bernd Tillack, Hans‐Joachim Müssig, Thomas Schroeder
Thin Solid Films

References

YearCitations

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