Design, modeling, and characterization of a MEMS electrothermal microgripper

Electrothermally activated SU-8 microgripper for single cell manipulation in solution

Nikos Chronis, Lydia Lee · Journal of Microelectromechanical Systems · 2005 · 378 citations

Engineering, Bioengineering, Robotics Engineering +16

Analysis and design of polysilicon thermal flexure actuator

Qing‐An Huang, Neville Ka Shek Lee · Journal of Micromechanics and Microengineering · 1999 · 331 citations

Engineering, Mechanical Engineering, Actuators +16

Silicon-processed overhanging microgripper

Chang‐Jin Kim, Albert P. Pisano, R.S. Muller · Journal of Microelectromechanical Systems · 1992 · 218 citations

Engineering, Materials Science, Mechanical Engineering +17

Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators

Ryan Hickey, Marek Kujath, Ted Hubbard · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 121 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS]

H. Kapels, Robert Aigner, J. Binder · IEEE Transactions on Electron Devices · 2000 · 108 citations

Engineering, Materials Engineering, Materials Science +17