Metal layer mask patterning by force microscopy lithography

Centimeter scale atomic force microscope imaging and lithography

S. C. Minne, Jonathan D. Adams, G.G. Yaralioglu et al. · Applied Physics Letters · 1998 · 200 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Scanning probes as a lithography tool for nanostructures

C. F. Quate · Surface Science · 1997 · 139 citations

Natural Sciences, Materials Engineering, Materials Science +12

Dynamic plowing nanolithography on polymethylmethacrylate using an atomic force microscope

Markus Heyde, Klaus Rademann, Brunero Cappella et al. · Review of Scientific Instruments · 2001 · 109 citations

Natural Sciences, Materials Engineering, Materials Science +16

Nanostructure patterns written in III–V semiconductors by an atomic force microscope

R. Magno, B. R. Bennett · Applied Physics Letters · 1997 · 100 citations

Engineering, Electrical Engineering, Materials Science +17

AFM lithography of aluminum for fabrication of nanomechanical systems

Zachary J. Davis, G. Abadal, Ole Hansen et al. · Ultramicroscopy · 2003 · 73 citations

Engineering, Materials Engineering, Materials Science +13