AFM lithography of aluminum for fabrication of nanomechanical systems - Concepedia

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AFM lithography of aluminum for fabrication of nanomechanical systems

73

Citations

11

References

2003

Year

Zachary J. Davis, G. Abadal, Ole Hansen, X. Borisé, N. Barniol, Francesc Pérez‐Murano, Anja Boisen

Ultramicroscopy

Materials ScienceEngineeringBeam LithographyMicrofabricationMechanical EngineeringAfm LithographyFabrication TechniqueNanolithography3D PrintingMicrostructureNanolithography Method

References

	Year	Citations

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