Silicon carbon nitride films as passivation and antireflective coatings for silicon solar cells

Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

Helmut Mäckel, R. Lüdemann · Journal of Applied Physics · 2002 · 247 citations

Engineering, Materials Engineering, Materials Science +17

Fourier transform infrared spectroscopy investigation of chemical bonding in low-k a-SiC:H thin films

Sean W. King, Marc French, Jeff Bielefeld et al. · Journal of Non-Crystalline Solids · 2011 · 107 citations

Natural Sciences, Materials Science, Physics +17

Optical, structural and electrical properties of device-quality hydrogenated amorphous silicon-nitrogen films deposited by plasma-enhanced chemical vapour deposition

Fabrizio Giorgis, F. Giuliani, Candido Fabrizio Pirri et al. · Philosophical Magazine B · 1998 · 77 citations

Engineering, Materials Engineering, Materials Science +17

Effect of PECVD silicon oxynitride film composition on the surface passivation of silicon wafers

Brett Hallam, Budi Tjahjono, Stuart Wenham · Solar Energy Materials and Solar Cells · 2011 · 68 citations

Engineering, Materials Engineering, Materials Science +16

Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy

Sean W. King, Jeff Bielefeld, Marc French et al. · Journal of Non-Crystalline Solids · 2011 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +16