Concepedia

Marc French

MF

Statistics

Publications

15

Citations

590

H-Index

13

Active since

2011

Affiliations

Intel (United States)(Current)

University at Albany, State University of New York

The University of Texas at Austin

University of Missouri–Kansas City

Marc French is an author at Intel (United States) specializing in applied physics, engineering, and materials science.

Top concepts

Publications per year

2011–2017

15

Publications

15

Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-<i>k</i>Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride

John T. Gaskins, Patrick E. Hopkins, Devin R. Merrill et al. · ECS Journal of Solid State Science and Technology · 2017 · 116 citations · Full text

, , +17

Fourier transform infrared spectroscopy investigation of chemical bonding in low-k a-SiC:H thin films

Sean W. King, Marc French, Jeff Bielefeld et al. · Journal of Non-Crystalline Solids · 2011 · 102 citations

, , +9

Film Property Requirements for Hermetic Low-k a-SiO<sub>x</sub>C<sub>y</sub>N<sub>z</sub>:H Dielectric Barriers

Sean W. King, Danya Jacob, D. Vanleuven et al. · ECS Journal of Solid State Science and Technology · 2012 · 59 citations

, , +18

Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy

Sean W. King, Jeff Bielefeld, Marc French et al. · Journal of Non-Crystalline Solids · 2011 · 54 citations

, , +8

X-ray photoelectron spectroscopy measurement of the Schottky barrier at the SiC(N)/Cu interface

Sean W. King, Marc French, Milt Jaehnig et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 50 citations

, , +13

1–5 of 15