Sean W. King

Cleaning of AlN and GaN surfaces

Sean W. King, J. P. Barnak, M. D. Bremser et al. · Journal of Applied Physics · 1998 · 299 citations

Materials Science, Materials Engineering, Chemical Engineering +13

Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects

Sean W. King · ECS Journal of Solid State Science and Technology · 2014 · 143 citations · Full text

Engineering, Metal Capping Materials, Adjacent Metal Lines +20

Cleaning of GaN surfaces

Laura L. Smith, Sean W. King, R. J. Nemanich et al. · Journal of Electronic Materials · 1996 · 136 citations

Engineering, Surface Science, Applied Physics +5

Thermal conductivity and thermal boundary resistance of atomic layer deposited high-<i>k</i> dielectric aluminum oxide, hafnium oxide, and titanium oxide thin films on silicon

Ethan A. Scott, John T. Gaskins, Sean W. King et al. · APL Materials · 2018 · 118 citations · Full text

Engineering, Dielectric Layer Thickness, Thermal Properties +22

Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-<i>k</i>Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride

John T. Gaskins, Patrick E. Hopkins, Devin R. Merrill et al. · ECS Journal of Solid State Science and Technology · 2017 · 116 citations · Full text

Aluminium Nitride, Optical Materials, Engineering +17