SU-8 MEMS Fabry-Perot pressure sensor

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 573 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Biocompatibility and biofouling of MEMS drug delivery devices

Gabriela Voskerician, Matthew S. Shive, Rebecca S. Shawgo et al. · Biomaterials · 2003 · 553 citations

Engineering, Bioengineering, Biomedical Engineering +12

Mechanical characterization of a new high-aspect-ratio near UV-photoresist

H. Lorenz, M. Laudon, Philippe Renaud · Microelectronic Engineering · 1998 · 192 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +10

Miniature fiber-optic pressure sensor

Yizheng Zhu, Anbo Wang · IEEE Photonics Technology Letters · 2005 · 179 citations

Engineering, Materials Science, Microfabrication +16

A novel MEMS pressure sensor fabricated on an optical fiber

Don C. Abeysinghe, Samhita Dasgupta, J. T. Boyd et al. · IEEE Photonics Technology Letters · 2001 · 178 citations

Engineering, Materials Science, Mechanical Engineering +17