Concepedia

Publication | Closed Access

SU-8 MEMS Fabry-Perot pressure sensor

DOI

135

Citations

17

References

2007

Year

Ginel C. Hill, Renata Melamud, F. Declercq, A.A. Davenport, Ian Chan, P.G. Hartwell, Beth L. Pruitt
Sensors and Actuators A Physical

References

YearCitations

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