GaAs field effect transistors fabricated by imprint lithography

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Sub-10 nm imprint lithography and applications

Stephen Y. Chou, Peter R. Krauss, Wei Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 1.1K citations

Engineering, Electrical Engineering, Materials Science +14

Mold-assisted nanolithography: A process for reliable pattern replication

J. Haisma, M.J. Verheijen, Kees van den Heuvel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 656 citations

Engineering, Materials Engineering, Materials Science +11

Problems of the nanoimprinting technique for nanometer scale pattern definition

Hella‐Christin Scheer, H. Schulz, Thomas Hoffmann · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 163 citations

Engineering, Materials Engineering, Materials Science +16

Hot embossing in polymers as a direct way to pattern resist

R.W. Jaszewski, Helmut Schift, J. Gobrecht et al. · Microelectronic Engineering · 1998 · 114 citations

Natural Sciences, Manufacturing Engineering, Materials Science +11