Micro-machining: A survey of the most commonly used processes

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Some Theorems on the Free Energies of Crystal Surfaces

Conyers Herring · Physical Review · 1951 · 1.6K citations

Natural Sciences, Chemistry, Physics +17

Plasma etching—A discussion of mechanisms

J. W. Coburn, Harold F. Winters · Journal of Vacuum Science and Technology · 1979 · 601 citations

Natural Sciences, Chemistry, Materials Science +15

Plasma-assisted etching

J. W. Coburn · Plasma Chemistry and Plasma Processing · 1982 · 205 citations

Ethylene Diamine-Pyrocatechol-Water Mixture Shows Etching Anomaly in Boron-Doped Silicon

A. Bohg · Journal of The Electrochemical Society · 1971 · 137 citations

Engineering, Materials Engineering, Materials Science +12