Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6

Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges

Markku Leskelä, Mikko Ritala · Angewandte Chemie International Edition · 2003 · 1.1K citations · Full text

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Surface Chemistry for Atomic Layer Growth

Steven M. George, A. W. Ott, J. W. Klaus · The Journal of Physical Chemistry · 1996 · 676 citations

Natural Sciences, Chemistry, Materials Science +17

Atomic layer deposition of transition metals

Booyong S. Lim, Antti Rahtu, Roy G. Gordon · Nature Materials · 2003 · 656 citations

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Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

Jeffrey W. Elam, Markus D. Groner, Steven M. George · Review of Scientific Instruments · 2002 · 561 citations

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Hydrogen desorption kinetics from monohydride and dihydride species on silicon surfaces

Pawan Gupta, Vicki L. Colvin, Steven M. George · Physical review. B, Condensed matter · 1988 · 556 citations

Natural Sciences, Chemistry, Materials Science +17