Materials Science in Semiconductor Processing · 2014 · 32 citations · 17 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectronicsSemiconductor MaterialsThin FilmsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsSurface PassivationThin-film MaterialsThin-film TransistorsPassivation LayersPassivation Of OxidesSemiconductor Oxide Thin FilmsSurface Passivation LayersThin Oxide FilmsThin Oxide LayersThin-film Oxides
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