Optics Letters · 2007 · 34 citations · 11 references
Natural SciencesMaterials SciencePhysicsOptical MaterialsPlasma PhysicsSpectroscopyHigh-temperature PlasmasLaser-plasma InteractionsUltraviolet SpectroscopyExtreme Ultraviolet EmissionExtreme Ultraviolet SpectroscopyUltraviolet Emission Spectra
Detailed spectroscopic studies on extreme UV emission from laser plasmas using tin and lithium planar solid targets were completed. At 13.5 nm, the best conversion efficiency (CE) for lithium was found to be 2.2% at intensities near 7 x 10(10) W/cm(2). The highest CE measured for tin was near 5.0% at an intensity close to 1 x 10(11) W/cm(2).
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Extreme Ultraviolet Lithography
Jeffrey Bokor · 1997 · 256 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13