Marc Klosner

Flexible Electronics and Displays: High-Resolution, Roll-to-Roll, Projection Lithography and Photoablation Processing Technologies for High-Throughput Production

Kanti Jain, Marc Klosner, M. Zemel et al. · Proceedings of the IEEE · 2005 · 205 citations

Engineering, Manufacturing Engineering, Materials Engineering +13

Intense xenon capillary discharge extreme-ultraviolet source in the 10–16-nm-wavelength region

Marc Klosner, W. T. Silfvast · Optics Letters · 1998 · 95 citations · Full text

Natural Sciences, Physics, Biomedical Optics +7

Xenon-emission-spectra identification in the 5–20-nm spectral region in highly ionized xenon capillary-discharge plasmas

Marc Klosner, W. T. Silfvast · Journal of the Optical Society of America B · 2000 · 45 citations · Full text

Natural Sciences, Physics, Plasma Physics +12

Intense plasma discharge source at 135 nm for extreme-ultraviolet lithography

Marc Klosner, H. Bender, W. T. Silfvast et al. · Optics Letters · 1997 · 36 citations · Full text

Natural Sciences, Physics, Optics +13

Large-area high-resolution lithography and photoablation systems for microelectronics and optoelectronics fabrication

Kanti Jain, M. Zemel, Marc Klosner · Proceedings of the IEEE · 2002 · 33 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13