Simi George - Concepedia

Author

Simi George

Lawrence Berkeley National Laboratory

Also Known As

George, Simi, S George, S. A. George, S. George, Shijo George, Simi A. George, Simi George

Publications

613

Citations

H-Index

Concepts

All Affiliations

Lawrence Berkeley National Laboratory University of Central Florida California State University, Long Beach Laboratoire Aimé Cotton Centre National de la Recherche Scientifique

About

Simi George is an author at Lawrence Berkeley National Laboratory specializing in engineering, applied physics, and physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	14	22	478
2	Applied Physics	14	17	376
3	Natural Sciences	7	7	157
4	Social Sciences	1	1	12
5	Art History	1	1	12

Simi George

Publications

478

Citations

H-Index

Page 1

	Year	Citations
Critical challenges for EUV resist materials Patrick Naulleau, Christopher N. Anderson, Lorie-Mae Baclea-an, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Short Wavelength OpticEngineeringElectron-beam LithographyWafer Scale ProcessingResistor	2011	62
Ligand Field Spectra of Some New Laser Chelates L. J. Nugent, M. L. Bhaumik, Simi George, The Journal of Chemical Physics Inorganic ChemistryEngineeringBiochemistryTheoretical Inorganic ChemistryNatural Sciences	1964	39
Hyperfine-structure measurements in bismuth using a Fourier-transform spectrometer Simi George, J. Vergès, J. H. Munsee Journal of the Optical Society of America B Microwave SpectroscopyFourier-transform SpectrometerEngineeringPhysicsElectron Spectroscopy	1985	35
Comparative extreme ultraviolet emission measurements for lithium and tin laser plasmas Simi George, W. T. Silfvast, Kazutoshi Takenoshita, Optics Letters Materials ScienceExtreme Uv EmissionOptical MaterialsEngineeringPhysics	2007	33
High conversion efficiency microscopic tin-doped droplet target laser-plasma source for EUVL Chiew-Seng Koay, Simi George, Kazutoshi Takenoshita, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE High Conversion EfficiencyEngineeringPhysicsOptical PropertiesLaser-induced Breakdown	2005	33
22-nm Half-pitch extreme ultraviolet node development at the SEMATECH Berkeley microfield exposure tool Patrick Naulleau, Christopher N. Anderson, Jerrin Chiu, Microelectronic Engineering Ultraviolet LightPhotonicsEngineeringElectron-beam LithographyPhysics	2009	31
13.5 nm EUV generation from tin-doped droplets using a fiber laser Simi George, Kai-Chung Hou, Kazutoshi Takenoshita, Optics Express Materials SciencePhotonicsComprehensive StudyIn-band Conversion EfficiencyEngineering	2007	24
Replicated mask surface roughness effects on EUV lithographic patterning and line edge roughness Simi George, Patrick Naulleau, Eric M. Gullikson, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyOptical TestingEuv Lithographic Patterning	2011	22
Implications of image plane line-edge roughness requirements on extreme ultraviolet mask specifications Patrick Naulleau, Simi George Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Short Wavelength OpticEngineeringElectron-beam LithographyBeam LithographyMask Multilayer Roughness	2009	21
Characterization of line-edge roughness (LER) propagation from resists: underlayer interfaces in ultrathin resist films Simi George, Patrick Naulleau, Ahila Krishnamoorthy, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringLine-edge RoughnessUnderlayer InterfacesResistorElectron Microscopy	2010	20

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