Lorie-Mae Baclea-an

Publications

Citations

H-Index

2011

Active since

Affiliations

Lawrence Berkeley National Laboratory(Current)

Lorie-Mae Baclea-an is an author at Lawrence Berkeley National Laboratory specializing in optoelectronics, microelectronics, and materials engineering.

Top concepts

PhysicsEngineeringApplied PhysicsNanoelectronicsOptoelectronicsMaterial ScienceMicroelectronicsElectrical InsulationMaterials Engineering

Publications per year

2011–2011

Publications

Critical challenges for EUV resist materials

Patrick Naulleau, Christopher N. Anderson, Lorie-Mae Baclea-an et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 62 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +18

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