Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2004 · 17 citations · 10 references
EngineeringNuclear EngineeringNuclear InstrumentationNuclear PhysicsRadiation TransportMicromachiningBeam BlankingBeam Spot Size
10
Dedicated accelerator and microprobe line
Klas Malmqvist, Gunnar Hyltén, M. Hult et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 46 citations
Engineering, Computer Science, Particle Physics +9
Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect
Harry J. Whitlow, May Ling Ng, Vaida Au elyté et al. · Nanotechnology · 2003 · 43 citations
Engineering, Bioengineering, Biomedical Engineering +15
Proton beam micromachining: a new tool for precision three-dimensional microstructures
J.A. van Kan, Andrew A. Bettiol, Boon‐Hong Wee et al. · Sensors and Actuators A Physical · 2001 · 40 citations
Engineering, Manufacturing Engineering, Materials Science +12
Development of single-ion implantation — controllability of implanted ion number
Takashi Matsukawa, T. Fukai, Shinsuke Suzuki et al. · Applied Surface Science · 1997 · 38 citations
Engineering, Biomedical Engineering, Implant Surgery +4
Development of the lund proton muprobe scanning and data acquisition system
N.E.G. Lövestam · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 30 citations
Engineering, Nuclear Engineering, Instrumentation +13