Proton beam micromachining: a new tool for precision three-dimensional microstructures

SU-8: a low-cost negative resist for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 972 citations · Full text

Engineering, Materials Engineering, Materials Science +11

PIXE: A novel technique for elemental analysis

Sven Johansson, Fred C. Adams · Analytica Chimica Acta · 1989 · 693 citations

Natural Sciences, Chemistry, Analytical Chemistry +11

The National University of Singapore nuclear microscope facility

F. Watt, I. Orlić, K.K. Loh et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 85 citations

Natural Sciences, Nuclear Engineering, Physics +3

Resist materials for proton micromachining

J.A. van Kan, J.L. Sanchez, Bing Xu et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 57 citations

Engineering, Materials Engineering, Materials Science +7

Micromachining using focused high energy ion beams: Deep Ion Beam Lithography

J.A. van Kan, J.L. Sanchez, Bing Xu et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 56 citations

Engineering, Manufacturing Engineering, Physics +13