Concepedia

Publication | Closed Access

Proton beam micromachining: a new tool for precision three-dimensional microstructures

DOI

40

Citations

9

References

2001

Year

J.A. van Kan, Andrew A. Bettiol, Boon‐Hong Wee, Tze Chien Sum, S.M. Tang, F. Watt
Sensors and Actuators A Physical

References

YearCitations

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