Lithography of high spatial density biosensor structures with sub-100 nm spacing by MeV proton beam writing with minimal proximity effect

Harry J. Whitlow, May Ling Ng, Vaida Au elyté, Ivan Maximov, Lars Montelius, J.A. van Kan, Andrew A. Bettiol, F. Watt

Nanotechnology · 2003 · 43 citations · 21 references

Concepts

Abstract

10.1088/0957-4484/15/1/040

References

21